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Department of Energy Awards High Temperature MEMS Project to Sporian Microsystems, Inc.

September 1, 2004 - BOULDER, COLORADO

The Department of Energy has awarded Sporian Microsystems, Inc. a follow-on contract to develop a high temperature MEMS (micro-electro-mechanical-system) sensor that will be used to monitor temperature and pressure under extremely harsh conditions up to 1400°C (2500°F). The contract is sponsored by the DOE through The National Energy Technology Laboratory in Morgantown, WV and will extend into late 2006.

MEMS technology is the integration of microscopic mechanical elements, sensors, actuators, and electronics achieved through micro-fabrication processes to realize very small (a typical MEMS structure is smaller than the width of a human hair), low cost, enabling components and systems. The MEMS sensor developed under this contract will take advantage of Sporian Microsystems' unique high temperature sensor fabrication technology, and will leverage the company's knowledge of MEMS and microelectronics packaging. "The idea is that these very small sensors can be placed in the highest temperature, harshest environment regions within engine and power generation systems, at temperatures that would melt aluminum or silicon. The very small size will result in no adverse effects on system performance, potentially increasing the efficiency, lifetime, and reducing the pollution of these systems." says Sporian President Brian Schaible.

The contract will be performed through a partnership between Sporian Microsystems and Dr. Linan An of the University of Central Florida. "A sensor that can survive up to 1400°C and accurately provide information about the environment will be a great step forward for sensing technology and the industries that wish to monitor these harsh environments. We are also very excited to be working with Dr. An and the University of Central Florida. Our combined areas of expertise provide a strong level of confidence for the success of this contract", affirmed project lead Wenge Zhang.  Commercially, the sensor holds great promise in providing information regarding the harsh environmental conditions associated with automotive and turbine engines, combustors, gasification processes and furnaces in a wide range of industries. Current state of the art MEMS sensors generally fail well below 800°C.

Sporian Microsystems was formed in 2000 as a R&D firm with the mission to develop and commercialize advanced MEMS (micro-electromechanical systems) based products, including sensors for environmental monitoring, for a range of industries including: energy generation, water heath management, environmental safety, homeland defense, telecommunications, aerospace, and military and commercial resource management.

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For More Information Contact:
Sporian Microsystems, Inc.
Bill Garrett, 303.516.9075x11

PR@Sporian.com

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